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Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
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Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
JVST B, Nanotechnology & microelectronics · JVST B · Journal of vacuum science and technology. · Nanotechnology & microelectronics · Nanotechnology and microelectronics · Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena · Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
ISSN-L 2166-2746 · 2166-2754(other medium)
United States · 2010
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Earliest year 2010
Basic information
Publisher — · United States
Country/Region United States
Subject Materials Science
Open access —
DOAJ —
License —
Earliest year 2010
DOAJ article records —
Submission page —
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Cost: APC amount not listed
Difficulty: —;4,495 articles per year
How to submit: No author guideline link yet; start from the journal website.
Open access: —
Reference data How to read journal metrics →
Articles/yr 4,495
h-index 64
2-yr mean citedness 2.40
Last publication year 2026
DOAJ article records —
Open access —
“2-yr mean citedness” is the OpenAlex field summary_stats.2yr_mean_citedness (CC0): mean citations per paper over a two-year window. It is a raw bibliometric field, not a journal rating, and is not used for default ranking.
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Subject classification
Engineering793
Materials Science705
Physics and Astronomy399
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